Tribology issues and opportunities in MEMS : proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9-11 November 1997 / edited by Bharat Bhushan).

Conference Author: NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS (1997 : Columbus, Ohio)
Published: Dordrecht ; Boston : Kluwer Academic, [1998]
Copyright Date: ©1998
Physical Description: xiv, 655 pages : illustrations ; 25 cm
Additional Creators: Bhushan, Bharat, 1949-