Tribology issues and opportunities in MEMS : proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9-11 November 1997 / edited by Bharat Bhushan).

Conference Author:: NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS (1997 : Columbus, Ohio)
Published:: Dordrecht ; Boston : Kluwer Academic, [1998]
Copyright Date:: ©1998
Physical Description:: xiv, 655 pages : illustrations ; 25 cm
Additional Creators:: Bhushan, Bharat, 1949-

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ISBN:

0792350243 (alk. paper)

Bibliography Note:

Includes bibliographical references and index.

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