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Automatic cross-sectioning and monitoring system locates defects in electronic devices

Author:
Slaughter, B.
Published:
Jul 1, 1971.
Physical Description:
1 electronic document
Additional Creators:
Jacobs, G.
Online Version

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Restrictions on Access:
Unclassified, Unlimited, Publicly available.
Free-to-read Unrestricted online access
Summary:
System consists of motorized grinding and lapping apparatus, sample holder, and electronic control circuit. Low power microscope examines device to pinpoint location of circuit defect, and monitor displays output signal when defect is located exactly.
Other Subject(s):
Collection:
NASA Technical Reports Server (NTRS) Collection.
Note:
Document ID: 19710000220.
Accession ID: 71B10221.
GSC-11221.
Terms of Use and Reproduction:
No Copyright.
View MARC record | catkey: 16207997