Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse
- Published
- Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015]
- Physical Description
- 1 online resource : illustrations
- Additional Creators
- Brand, Oliver, Dufour, Isabelle, Heinrich, Stephen M., and Josse, Fabien
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- Series
- Contents
- Machine generated contents note: 1.Fundamental Theory of Resonant MEMS Devices -- 1.1.Introduction / Isabelle Dufour / Stephen M. Heinrich -- 1.2.Nomenclature / Isabelle Dufour / Stephen M. Heinrich -- 1.3.Single-Degree-of-Freedom (SDOF) Systems / Isabelle Dufour / Stephen M. Heinrich -- 1.3.1.Free Vibration / Isabelle Dufour / Stephen M. Heinrich -- 1.3.2.Harmonically Forced Vibration / Isabelle Dufour / Stephen M. Heinrich -- 1.3.3.Contributions to Quality Factor from Multiple Sources / Isabelle Dufour / Stephen M. Heinrich -- 1.4.Continuous Systems Modeling: Microcantilever Beam Example / Isabelle Dufour / Stephen M. Heinrich -- 1.4.1.Modeling Assumptions / Isabelle Dufour / Stephen M. Heinrich -- 1.4.2.Boundary Value Problem for a Vibrating Microcantilever / Isabelle Dufour / Stephen M. Heinrich -- 1.4.3.Free-Vibration Response of Microcantilever / Isabelle Dufour / Stephen M. Heinrich -- 1.4.4.Steady-State Response of a Harmonically Excited Microcantilever / Isabelle Dufour / Stephen M. Heinrich -- 1.5.Formulas for Undamped Natural Frequencies / Isabelle Dufour / Stephen M. Heinrich -- 1.5.1.Simple Deformations (Axial, Bending, Twisting) of 1D Structural Members: Cantilevers and Doubly Clamped Members ("Bridges") / Isabelle Dufour / Stephen M. Heinrich -- 1.5.1.1.Axial Vibrations (Along x-Axis) / Isabelle Dufour / Stephen M. Heinrich -- 1.5.1.2.Torsional Vibrations (Based on h < b) (Twist About x-Axis) / Isabelle Dufour / Stephen M. Heinrich -- 1.5.1.3.Flexural (Bending) Vibrations / Isabelle Dufour / Stephen M. Heinrich -- 1.5.2.Transverse Deflection of 2D Structures: Circular and Square Plates with Free and Clamped Supports / Isabelle Dufour / Stephen M. Heinrich -- 1.5.3.Transverse Deflection of 1D Membrane Structures ("Strings") / Isabelle Dufour / Stephen M. Heinrich -- 1.5.4.Transverse Deflection of 2D Membrane Structures: Circular and Square Membranes under Uniform Tension and Supported along Periphery / Isabelle Dufour / Stephen M. Heinrich -- 1.5.5.In-Plane Deformation of Slender Circular Rings / Isabelle Dufour / Stephen M. Heinrich -- 1.5.5.1.Extensional Modes / Isabelle Dufour / Stephen M. Heinrich -- 1.5.5.2.In-Plane Bending Modes / Isabelle Dufour / Stephen M. Heinrich -- 1.6.Summary / Isabelle Dufour / Stephen M. Heinrich -- Acknowledgment / Isabelle Dufour / Stephen M. Heinrich -- References / Isabelle Dufour / Stephen M. Heinrich -- 2.Frequency Response of Cantilever Beams Immersed in Viscous Fluids / Isabelle Dufour / Stephen M. Heinrich -- 2.1.Introduction / John Elie Sader / Cornelis Anthony van Eysden -- 2.2.Low Order Modes / Cornelis Anthony van Eysden / John Elie Sader -- 2.2.1.Flexural Oscillation / John Elie Sader / Cornelis Anthony van Eysden -- 2.2.2.Torsional Oscillation / John Elie Sader / Cornelis Anthony van Eysden -- 2.2.3.In-Plane Flexural Oscillation / John Elie Sader / Cornelis Anthony van Eysden -- 2.2.4.Extensional Oscillation / John Elie Sader / Cornelis Anthony van Eysden -- 2.3.Arbitrary Mode Order / John Elie Sader / Cornelis Anthony van Eysden -- 2.3.1.Incompressible Flows / John Elie Sader / Cornelis Anthony van Eysden -- 2.3.2.Compressible Flows / John Elie Sader / Cornelis Anthony van Eysden -- 2.3.2.1.Scaling Analysis / John Elie Sader / Cornelis Anthony van Eysden -- 2.3.2.2.Numerical Results / John Elie Sader / Cornelis Anthony van Eysden -- References / John Elie Sader / Cornelis Anthony van Eysden -- 3.Damping in Resonant MEMS / John Elie Sader / Cornelis Anthony van Eysden -- 3.1.Introduction / Thomas William Kenny / Shirin Ghaffari -- 3.2.Air Damping / Thomas William Kenny / Shirin Ghaffari -- 3.3.Surface Damping / Thomas William Kenny / Shirin Ghaffari -- 3.4.Anchor Damping / Thomas William Kenny / Shirin Ghaffari -- 3.5.Electrical Damping / Thomas William Kenny / Shirin Ghaffari -- 3.6.Thermoelastic Dissipation (TED) / Thomas William Kenny / Shirin Ghaffari -- 3.7.Akhiezer Effect (AKE) / Thomas William Kenny / Shirin Ghaffari -- References / Thomas William Kenny / Shirin Ghaffari -- 4.Parametrically Excited Micro- and Nanosystems / Thomas William Kenny / Shirin Ghaffari -- 4.1.Introduction / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.2.Sources of Parametric Excitation in MEMS and NEMS / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.2.1.Parametric Excitation via Electrostatic Transduction / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.2.2.Other Sources of Parametric Excitation / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.3.Modeling the Underlying Dynamics[—]Variants of the Mathieu Equation / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.4.Perturbation Analysis / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.5.Linear, Steady-State Behaviors / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.6.Sources of Nonlinearity and Nonlinear Steady-State Behaviors / Gary K. Fedder / Congzhong Guo / Jeffrey F. Rhoads -- 4.7.Complex Dynamics in Parametrically Excited Micro/Nanosystems / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.8.Combined Parametric and Direct Excitations / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.9.Select Applications / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.9.1.Resonant Mass Sensing / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.9.2.Inertial Sensing / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.9.3.Micromirror Actuation / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 4.9.4.Bifurcation Control / Jeffrey F. Rhoads / Congzhong Guo / Gary K. Fedder -- 4.10.Some Parting Thoughts / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- Acknowledgment / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- References / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 5.Finite Element Modeling of Resonators / Jeffrey F. Rhoads / Gary K. Fedder / Congzhong Guo -- 5.1.Introduction to Finite Element Analysis / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.1.1.Mathematical Fundamentals / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.1.1.1.Static Problems / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.1.1.2.Dynamic Problems (Modal Analysis) / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.1.2.Practical Implementation / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.1.2.1.Set Up / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.1.2.2.Processing / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.1.2.3.Post-processing / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.2.Application of FEA in MEMS Resonator Design / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.2.1.Modal Analysis / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.2.1.1.Mode Shape Analysis for Design Optimization / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.2.1.2.Modeling Process-Induced Variation / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.2.2.Loss Analysis / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.2.2.1.Anchor Loss / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.2.2.2.Thermoelastic Damping / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.2.3.Frequency Response Analysis / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.2.3.1.Spurious Mode Identification and Rejection / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.2.3.2.Filter Design / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 5.3.Summary / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- References / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 6.Capacitive Resonators / Reza Abdolvand / Gavin Ho / Jonathan Gonzales -- 6.1.Introduction / Gary K. Fedder -- 6.2.Capacitive Transduction / Gary K. Fedder -- 6.3.Electromechanical Actuation / Gary K. Fedder -- 6.3.1.Electromechanical Force Derivation / Gary K. Fedder -- 6.3.2.Voltage Dependent Force Components / Gary K. Fedder -- 6.4.Capacitive Sensing and Motional Capacitor Topologies / Gary K. Fedder -- 6.4.1.Parallel-Moving Plates / Gary K. Fedder -- 6.4.2.Perpendicular Moving Plates / Gary K. Fedder -- 6.4.3.Electrostatic Spring Softening and Snap-In / Gary K. Fedder -- 6.4.4.Angular Moving Plates / Gary K. Fedder -- 6.5.Electrical Isolation / Gary K. Fedder -- 6.6.Capacitive Resonator Circuit Models / Gary K. Fedder -- 6.7.Capacitive Interfaces / Gary K. Fedder -- 6.7.1.Transimpedance Amplifier / Gary K. Fedder -- 6.7.2.High-Impedance Voltage Detection / Gary K. Fedder -- 6.7.3.Switched-Capacitor Detection / Gary K. Fedder -- 6.8.Conclusion / Gary K. Fedder -- Acknowledgment / Gary K. Fedder -- References / Gary K. Fedder -- 7.Piezoelectric Resonant MEMS / Gary K. Fedder -- 7.1.Introduction to Piezoelectric Resonant MEMS / Gianluca Piazza -- 7.2.Fundamentals of Piezoelectricity and Piezoelectric Resonators / Gianluca Piazza -- 7.3.Thin Film Piezoelectric Materials for Resonant MEMS / Gianluca Piazza -- 7.4.Equivalent Electrical Circuit of Piezoelectric Resonant MEMS / Gianluca Piazza -- 7.4.1.One-Port Piezoelectric Resonators / Gianluca Piazza -- 7.4.2.Two-Port Piezoelectric Resonators / Gianluca Piazza -- 7.4.3.Resonator Figure of Merit / Gianluca Piazza -- 7.5.Examples of Piezoelectric Resonant MEMS: Vibrations in Beams, Membranes, and Plates / Gianluca Piazza -- 7.5.1.Flexural Vibrations / Gianluca Piazza -- 7.5.2.Width-Extensional Vibrations / Gianluca Piazza -- 7.5.3.Thickness-Extensional and Shear Vibrations / Gianluca Piazza -- 7.6.Conclusions / Gianluca Piazza -- References / Gianluca Piazza -- 8.Electrothermal Excitation of Resonant MEMS / Gianluca Piazza -- 8.1.Basic Principles / Oliver Brand / Siavash Pourkamali -- 8.1.1.Fundamental Equations for Electro-Thermo-Mechanical Transduction / Oliver Brand / Siavash Pourkamali -- 8.1.2.Time Constants and Frequency Dependencies / Oliver Brand / Siavash Pourkamali -- 8.2.Actuator Implementations / Oliver Brand / Siavash Pourkamali -- 8.2.1.Thin-Film/Surface Actuators / Oliver Brand / Siavash Pourkamali -- 8.2.2.Bulk Actuators / Oliver Brand / Siavash Pourkamali --, Contents note continued: 8.3.Piezoresistive Sensing / Oliver Brand / Siavash Pourkamali -- 8.3.1.Fundamental Equations for Piezoresistive Sensing / Oliver Brand / Siavash Pourkamali -- 8.3.2.Piezoresistor Implementations / Oliver Brand / Siavash Pourkamali -- 8.3.3.Self-Sustained Thermal-Piezoresistive Oscillators / Oliver Brand / Siavash Pourkamali -- 8.4.Modeling and Optimization of Single-Port Thermal-Piezoresistive Resonators / Oliver Brand / Siavash Pourkamali -- 8.4.1.Thermo-Electro-Mechanical Modeling / Oliver Brand / Siavash Pourkamali -- 8.4.2.Resonator Equivalent Electrical Circuit and Optimization / Oliver Brand / Siavash Pourkamali -- 8.5.Examples of Thermally Actuated Resonant MEMS / Oliver Brand / Siavash Pourkamali -- References / Oliver Brand / Siavash Pourkamali -- 9.Nanoelectromechanical Systems (NEMS) / Oliver Brand / Siavash Pourkamali -- 9.1.Introduction / Luis Guillermo Villanueva / Nuria Barniol / Francesc Perez-Murano / Warner J. Venstra / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Jurgen Brugger / Liviu Nicu / Vaida Auzelyte -- 9.1.1.Fundamental Studies / Liviu Nicu / Vaida Auzelyte / Luis Guillermo Villanueva / Nuria Barniol / Francesc Perez-Murano / Warner J. Venstra / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Jurgen Brugger -- 9.1.2.Transduction at the Nanoscale / Liviu Nicu / Vaida Auzelyte / Luis Guillermo Villanueva / Nuria Barniol / Francesc Perez-Murano / Warner J. Venstra / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Jurgen Brugger -- 9.1.3.Materials, Fabrication, and System Integration / Liviu Nicu / Vaida Auzelyte / Luis Guillermo Villanueva / Nuria Barniol / Francesc Perez-Murano / Warner J. Venstra / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Jurgen Brugger -- 9.1.4.Electronics / Liviu Nicu / Vaida Auzelyte / Luis Guillermo Villanueva / Nuria Barniol / Francesc Perez-Murano / Warner J. Venstra / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Jurgen Brugger -- 9.1.5.Nonlinear MEMS/NEMS Applications / Liviu Nicu / Vaida Auzelyte / Luis Guillermo Villanueva / Nuria Barniol / Francesc Perez-Murano / Warner J. Venstra / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Jurgen Brugger -- 9.2.Carbon-Based NEMS / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Jurgen Brugger / Liviu Nicu / Vaida Auzelyte / Luis Guillermo Villanueva / Nuria Barniol / Francesc Perez-Murano / Warner J. Venstra -- 9.3.Toward Functional Bio-NEMS / Liviu Nicu / Vaida Auzelyte / Luis Guillermo Villanueva / Nuria Barniol / Francesc Perez-Murano / Warner J. Venstra / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Jurgen Brugger -- 9.3.1.NEMS-Based Energy Harvesting: an Emerging Field / Liviu Nicu / Vaida Auzelyte / Luis Guillermo Villanueva / Nuria Barniol / Francesc Perez-Murano / Warner J. Venstra / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Jurgen Brugger -- 9.4.Summary and Outlook / Liviu Nicu / Vaida Auzelyte / Luis Guillermo Villanueva / Nuria Barniol / Francesc Perez-Murano / Warner J. Venstra / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Jurgen Brugger -- References / Nuria Barniol / Luis Guillermo Villanueva / Vaida Auzelyte / Liviu Nicu / Jurgen Brugger / Warner J. Venstra / Herre S.J. van der Zant / Gabriel Abadal / Veronica Savu / Francesc Perez-Murano -- 10.Organic Resonant MEMS Devices / Nuria Barniol / Luis Guillermo Villanueva / Vaida Auzelyte / Liviu Nicu / Francesc Perez-Murano / Jurgen Brugger / Veronica Savu / Gabriel Abadal / Herre S.J. van der Zant / Warner J. Venstra -- 10.1.Introduction / Sylvan Schmid -- 10.2.Device Designs / Sylvan Schmid -- 10.2.1.Conductive Polymer with Electrostatic Actuation / Sylvan Schmid -- 10.2.2.Dielectric Polymer with Polarization Force Actuation / Sylvan Schmid -- 10.2.3.Superparamagnetic Nanoparticle Composite with Magnetic Actuation / Sylvan Schmid -- 10.2.4.Metallized Polymer with Lorentz Force Actuation / Sylvan Schmid -- 10.3.Quality Factor of Polymeric Micromechanical Resonators / Sylvan Schmid -- 10.3.1.Quality Factor in Viscous Environment / Sylvan Schmid -- 10.3.2.Quality Factor of Relaxed Resonators in Vacuum / Sylvan Schmid -- 10.3.3.Quality Factor of Unrelaxed Resonators in Vacuum / Sylvan Schmid -- 10.4.Applications / Sylvan Schmid -- 10.4.1.Humidity Sensor / Sylvan Schmid -- 10.4.2.Vibrational Energy Harvesting / Sylvan Schmid -- 10.4.3.Artificial Cochlea / Sylvan Schmid -- References / Sylvan Schmid -- 11.Devices with Embedded Channels / Sylvan Schmid -- 11.1.Introduction / Thomas P. Burg -- 11.2.Theory / Thomas P. Burg -- 11.2.1.Effects of Fluid Density and Flow / Thomas P. Burg -- 11.2.2.Effects of Viscosity on the Quality Factor / Thomas P. Burg -- 11.2.3.Effect of Surface Reactions / Thomas P. Burg -- 11.2.4.Single Particle Measurements / Thomas P. Burg -- 11.3.Device Technology / Thomas P. Burg -- 11.3.1.Fabrication / Thomas P. Burg -- 11.3.2.Packaging Considerations / Thomas P. Burg -- 11.4.Applications / Thomas P. Burg -- 11.4.1.Measurements of Fluid Density and Mass Flow / Thomas P. Burg -- 11.4.2.Single Particle and Single Cell Measurements / Thomas P. Burg -- 11.4.3.Surface-Based Measurements / Thomas P. Burg -- 11.5.Conclusion / Thomas P. Burg -- References / Thomas P. Burg -- 12.Hermetic Packaging for Resonant MEMS / Thomas P. Burg -- 12.1.Introduction / Matthew William Messana / Andrew Bradley Graham / Thomas William Kenny -- 12.2.Overview of Packaging Types / Matthew William Messana / Andrew Bradley Graham / Thomas William Kenny -- 12.3.Die-Level Vacuum-Can Packaging / Matthew William Messana / Andrew Bradley Graham / Thomas William Kenny -- 12.4.Wafer Bonding for Device Packaging / Matthew William Messana / Andrew Bradley Graham / Thomas William Kenny -- 12.5.Thin Film Encapsulation-Based Packaging / Andrew Bradley Graham / Matthew William Messana / Thomas William Kenny -- 12.6.Getters / Matthew William Messana / Andrew Bradley Graham / Thomas William Kenny -- 12.7.The "Stanford epi-Seal Process" for Packaging of MEMS Resonators / Andrew Bradley Graham / Matthew William Messana / Thomas William Kenny -- 12.8.Conclusion / Matthew William Messana / Andrew Bradley Graham / Thomas William Kenny -- References / Matthew William Messana / Andrew Bradley Graham / Thomas William Kenny -- 13.Compensation, Tuning, and Trimming of MEMS Resonators / Matthew William Messana / Andrew Bradley Graham / Thomas William Kenny -- 13.1.Introduction / Roozbeh Tabrizian / Farrokh Ayazi -- 13.2.Compensation Techniques in MEMS Resonators / Farrokh Ayazi / Roozbeh Tabrizian -- 13.2.1.Compensation for Thermal Effects / Farrokh Ayazi / Roozbeh Tabrizian -- 13.2.1.1.Engineering the Geometry / Farrokh Ayazi / Roozbeh Tabrizian -- 13.2.1.2.Doping / Farrokh Ayazi / Roozbeh Tabrizian -- 13.2.1.3.Composite Resonators / Farrokh Ayazi / Roozbeh Tabrizian -- 13.2.2.Compensation for Manufacturing Uncertainties / Farrokh Ayazi / Roozbeh Tabrizian -- 13.2.3.Compensation and Control of Quality Factor / Farrokh Ayazi / Roozbeh Tabrizian -- 13.2.4.Compensation for Polarization Voltage / Farrokh Ayazi / Roozbeh Tabrizian -- 13.3.Tuning Methods in MEMS Resonators / Farrokh Ayazi / Roozbeh Tabrizian -- 13.3.1.Device Level Tuning / Farrokh Ayazi / Roozbeh Tabrizian -- 13.3.1.1.Electrostatic Tuning / Farrokh Ayazi / Roozbeh Tabrizian -- 13.3.1.2.Thermal Tuning / Farrokh Ayazi / Roozbeh Tabrizian -- 13.3.1.3.Piezoelectric Tuning / Farrokh Ayazi / Roozbeh Tabrizian -- 13.3.2.System-Level Tuning / Farrokh Ayazi / Roozbeh Tabrizian -- 13.4.Trimming Methods / Farrokh Ayazi / Roozbeh Tabrizian -- References / Farrokh Ayazi / Roozbeh Tabrizian -- 14.MEMS Inertial Sensors / Farrokh Ayazi / Roozbeh Tabrizian -- 14.1.Introduction / Farrokh Ayazi / Diego Emilio Serrano -- 14.2.Accelerometers / Farrokh Ayazi / Diego Emilio Serrano -- 14.2.1.Principles of Operation / Farrokh Ayazi / Diego Emilio Serrano -- 14.2.2.Quasi-Static Accelerometers / Farrokh Ayazi / Diego Emilio Serrano -- 14.2.2.1.Squeeze-Film Damping / Farrokh Ayazi / Diego Emilio Serrano -- 14.2.2.2.Electromechanical Transduction in Accelerometers / Farrokh Ayazi / Diego Emilio Serrano -- 14.2.2.3.Mechanical Noise in Accelerometers / Farrokh Ayazi / Diego Emilio Serrano -- 14.2.3.Resonant Accelerometers / Farrokh Ayazi / Diego Emilio Serrano -- 14.2.3.1.Electrostatic Spring-Softening / Farrokh Ayazi / Diego Emilio Serrano -- 14.2.3.2.Acceleration Sensitivity in Resonant Accelerometers / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.Gyroscopes / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.1.Principles of Operation / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.1.1.Vibratory Gyroscopes / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.1.2.Mode-Split versus Mode-Matched Gyroscopes / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.2.Bulk-Acoustic Wave (BAW) Gyroscopes / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.2.1.Angular Gain / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.2.2.Zero-Rate Output / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.2.3.ZRO Cancelation / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.2.4.Electromechanical Transduction in Gyroscopes / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.2.5.Electrostatic Mode Matching and Mode Alignment / Farrokh Ayazi / Diego Emilio Serrano -- 14.3.3.Mechanical Noise in Mode-Matched Gyroscopes / Farrokh Ayazi / Diego Emilio Serrano -- 14.4.Multi-degree-of-Freedom Inertial Measurement Units / Farrokh Ayazi / Diego Emilio Serrano -- 14.4.1.System-in-Package IMUs / Diego Emilio Serrano / Farrokh Ayazi -- 14.4.2.Single-Die IMUs / Farrokh Ayazi / Diego Emilio Serrano -- 14.4.3.Future Trends in Sensor Integration / Farrokh Ayazi / Diego Emilio Serrano -- References / Farrokh Ayazi / Diego Emilio Serrano -- 15.Resonant MEMS Chemical Sensors / Farrokh Ayazi / Diego Emilio Serrano -- 15.1.Introduction / Luke A. Beardslee / Fabien Josse / Oliver Brand --, and Contents note continued: 15.2.Modeling of Resonant Microcantilever Chemical Sensors / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.2.1.Generalized Resonant Frequency / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.3.Effects of Chemical Analyte Sorption into the Coating / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.3.1.Resonant Frequency / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.3.2.Quality Factor / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.4.Figures of Merit / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.5.Chemically Sensitive Layers / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.6.Packaging / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.7.Gas-Phase Chemical Sensors / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.8.Liquid-Phase Chemical Sensors / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.8.1.Cantilevers / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.8.2.Microdisk Resonators / Fabien Josse / Oliver Brand / Luke A. Beardslee -- 15.8.3.Acoustic Wave Sensors / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 15.8.4.Resonators with Encapsulated Channels / Luke A. Beardslee / Fabien Josse / Oliver Brand -- References / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 16.Biosensors / Luke A. Beardslee / Fabien Josse / Oliver Brand -- 16.1.Introduction / Raj Mutharasan / Blake N. Johnson -- 16.2.Design Considerations: Length Scale, Geometry, and Materials / Raj Mutharasan / Blake N. Johnson -- 16.2.1.Fabrication Materials / Raj Mutharasan / Blake N. Johnson -- 16.2.2.Single-Layer Geometry / Raj Mutharasan / Blake N. Johnson -- 16.2.3.Multi-Layer Geometry / Raj Mutharasan / Blake N. Johnson -- 16.2.4.Length Scales / Raj Mutharasan / Blake N. Johnson -- 16.3.Surface Functionalization: Preparation, Passivation, and Bio-recognition / Raj Mutharasan / Blake N. Johnson -- 16.3.1.Antibody-Based Bio-recognition / Raj Mutharasan / Blake N. Johnson -- 16.3.2.Nucleic Acid-Based Bio-recognition / Raj Mutharasan / Blake N. Johnson -- 16.3.3.Alternative Bio-recognition Agents / Raj Mutharasan / Blake N. Johnson -- 16.4.Biosensing Application Formats / Raj Mutharasan / Blake N. Johnson -- 16.4.1.Dip-Dry-Measure Method / Raj Mutharasan / Blake N. Johnson -- 16.4.2.Continuous Flow Method / Raj Mutharasan / Blake N. Johnson -- 16.5.Application Case Studies / Raj Mutharasan / Blake N. Johnson -- 16.5.1.Whole Cells: Pathogens and Parasites / Raj Mutharasan / Blake N. Johnson -- 16.5.1.1.Foodborne Pathogen: Escherichia coli 0157:H7 / Raj Mutharasan / Blake N. Johnson -- 16.5.1.2.Foodborne Pathogen: Listeria monocytogenes / Raj Mutharasan / Blake N. Johnson -- 16.5.1.3.Waterborne Parasite: Cryptosporidium parvum / Raj Mutharasan / Blake N. Johnson -- 16.5.1.4.Waterborne Parasite: Giardia lamblia / Raj Mutharasan / Blake N. Johnson -- 16.5.2.Proteins: Biomarkers and Toxins / Raj Mutharasan / Blake N. Johnson -- 16.5.2.1.Prostate Cancer Biomarker: Prostate Specific Antigen / Raj Mutharasan / Blake N. Johnson -- 16.5.2.2.Prostate Cancer Biomarker: Alpha-methylacyl-CoA Racemase (AMACR) / Raj Mutharasan / Blake N. Johnson -- 16.5.2.3.Toxin in Source Water: Microcystin / Raj Mutharasan / Blake N. Johnson -- 16.5.2.4.Toxin in Food Matrices: Staphylococcal enterotoxin B / Raj Mutharasan / Blake N. Johnson -- 16.5.3.Virus / Raj Mutharasan / Blake N. Johnson -- 16.5.4.Nucleic Acids: Biomarkers and Genes Associated with Toxin Production / Blake N. Johnson / Raj Mutharasan -- 16.5.4.1.RNA-Based Biomarkers: MicroRNA / Raj Mutharasan / Blake N. Johnson -- 16.5.4.2.Gene Signature of a Virus / Raj Mutharasan / Blake N. Johnson -- 16.5.4.3.Toxin-Associated Genes for Pathogen Detection without DNA Amplification / Raj Mutharasan / Blake N. Johnson -- 16.6.Conclusions and Future Trends / Raj Mutharasan / Blake N. Johnson -- Acknowledgment / Raj Mutharasan / Blake N. Johnson -- References / Raj Mutharasan / Blake N. Johnson -- 17.Fluid Property Sensors / Raj Mutharasan / Blake N. Johnson -- 17.1.Introduction / Erwin K. Reichel / Bernhard Jakoby / Martin Heinisch -- 17.2.Definition of Fluid Properties / Erwin K. Reichel / Bernhard Jakoby / Martin Heinisch -- 17.2.1.Rheological Properties / Erwin K. Reichel / Bernhard Jakoby / Martin Heinisch -- 17.2.2.Time-Harmonic Deformation / Erwin K. Reichel / Bernhard Jakoby / Martin Heinisch -- 17.2.3.Classical Methods for Measuring Fluid Properties / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.2.4.Miniaturized Rheometers / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.3.Resonator Sensors / Martin Heinisch / Erwin K. Reichel / Bernhard Jakoby -- 17.3.1.Excitation and Readout / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.3.2.Eigenmode Decomposition / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.3.3.Electrical Equivalent Circuit / Martin Heinisch / Erwin K. Reichel / Bernhard Jakoby -- 17.3.4.Damping / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.3.5.Fluid-Structure Interaction / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.4.Examples of Resonant Sensors for Fluid Properties / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.4.1.Microacoustic Devices / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.4.2.MEMS Devices / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.4.2.1.Cantilever Devices / Erwin K. Reichel / Bernhard Jakoby / Martin Heinisch -- 17.4.2.2.U-Shaped Cantilevers / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.4.2.3.Tuning Forks / Martin Heinisch / Erwin K. Reichel / Bernhard Jakoby -- 17.4.2.4.Doubly-Clamped Beam Devices / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.4.2.5.In-Plane Resonators / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.4.2.6.Other Principles / Martin Heinisch / Erwin K. Reichel / Bernhard Jakoby -- 17.4.3.Comparison / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 17.5.Conclusions / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- References / Erwin K. Reichel / Bernhard Jakoby / Martin Heinisch -- 18.Energy Harvesting Devices / Erwin K. Reichel / Martin Heinisch / Bernhard Jakoby -- 18.1.Introduction / Stephen P. Beeby -- 18.2.Generic Harvester Structures / Stephen P. Beeby -- 18.2.1.Inertial Energy Harvesters / Stephen P. Beeby -- 18.2.2.Direct Force Energy Harvesters / Stephen P. Beeby -- 18.2.3.Broadband Energy Harvesters / Stephen P. Beeby -- 18.2.4.Frequency Conversion / Stephen P. Beeby -- 18.3.MEMS Energy Harvester Transduction Mechanisms / Stephen P. Beeby -- 18.3.1.Piezoelectric Transduction / Stephen P. Beeby -- 18.3.2.Electromagnetic Transduction / Stephen P. Beeby -- 18.3.3.Electrostatic Transduction / Stephen P. Beeby -- 18.3.4.Other Transducer Materials / Stephen P. Beeby -- 18.4.Review and Comparison of MEMS Energy Harvesting Devices / Stephen P. Beeby -- 18.5.Conclusions / Stephen P. Beeby -- References / Stephen P. Beeby.
- Subject(s)
- ISBN
- 3527676333 electronic bk.
3527676341 electronic bk.
352767635X electronic bk.
3527676368 electronic bk.
9783527676330 electronic bk.
9783527676347 electronic bk.
9783527676354 electronic bk.
9783527676361 electronic bk.
9783527335459 - Note
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note
- Includes bibliographical references and index.
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