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Fabrication of magnetic bubble memory overlay

Published
Mar 1, 1973.
Physical Description
1 electronic document
Online Version

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Restrictions on Access
Unclassified, Unlimited, Publicly available.
Free-to-read Unrestricted online access
Summary
Self-contained magnetic bubble memory overlay is fabricated by process that employs epitaxial deposition to form multi-layered complex of magnetically active components on single chip. Overlay fabrication comprises three metal deposition steps followed by subtractive etch.
Other Subject(s)
Collection
NASA Technical Reports Server (NTRS) Collection.
Note
Document ID: 19730000096.
Accession ID: 73B10096.
MFS-22377.
Terms of Use and Reproduction
No Copyright.
View MARC record | catkey: 16410137