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Fluid jet seed particle generator for silane pyrolysis reactor

Author:
Iya, Sridhar K.
Published:
January 3, 1984.
Physical Description:
1 electronic document
Online Version

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Unclassified, Unlimited, Publicly available.
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Summary:
Method is provided for generating fine sized seed particles of silicon for use in the fluidized bed pyrolysis of silane.
Other Subject(s):
Collection:
NASA Technical Reports Server (NTRS) Collection.
Note:
Document ID: 20080007392.
Terms of Use and Reproduction:
No Copyright.
View MARC record | catkey: 17028241