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Fluid jet seed particle generator for silane pyrolysis reactor
Iya, Sridhar K.
January 3, 1984.
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Method is provided for generating fine sized seed particles of silicon for use in the fluidized bed pyrolysis of silane.
Inorganic, Organic and Physical Chemistry
NASA Technical Reports Server (NTRS) Collection.
Document ID: 20080007392.
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| catkey: 17028241