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Method for producing a hybridization of detector array and integrated circuit for readout

Author:
Fossum, Eric R.
Published:
Aug 17, 1993.
Physical Description:
1 electronic document
Additional Creators:
Grunthaner, Frank J.
Online Version

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Unclassified, Unlimited, Publicly available.
Free-to-read Unrestricted online access
Summary:
A process is explained for fabricating a detector array in a layer of semiconductor material on one substrate and an integrated readout circuit in a layer of semiconductor material on a separate substrate in order to select semiconductor material for optimum performance of each structure, such as GaAs for the detector array and Si for the integrated readout circuit. The detector array layer is lifted off its substrate, laminated on the metallized surface on the integrated surface, etched with reticulating channels to the surface of the integrated circuit, and provided with interconnections between the detector array pixels and the integrated readout circuit through the channels. The adhesive material for the lamination is selected to be chemically stable to provide electrical and thermal insulation and to provide stress release between the two structures fabricated in semiconductor materials that may have different coefficients of thermal expansion.
Other Subject(s):
Collection:
NASA Technical Reports Server (NTRS) Collection.
Note:
Document ID: 19940006201.
Accession ID: 94N10656.
Terms of Use and Reproduction:
No Copyright.
View MARC record | catkey: 17030352