III-V integrated circuit fabrication technology / Shiban Tiku, Dhrubes Biswas
- Author:
- Tiku, Shiban Kishan
- Additional Titles:
- Three-five integrated circuit fabrication technology and 3-5 integrated circuit fabrication technology
- Published:
- Boca Raton, Florida : CRC Press, [2016]
- Copyright Date:
- ©2016
- Physical Description:
- 1 online resource : text file, PDF
- Additional Creators:
- Biswas, Dhrubes
- Access Online:
- ezaccess.libraries.psu.edu
- Contents:
- 1. Semiconductor basics -- 2. GaAs devices -- 3. Phase diagrams and crystal growth of compound semiconductors -- 4. Epitaxy -- 5. Photolithography -- 6. Wet etching, cleaning, and passivation -- 7. Plasma processing and dry etching -- 8. Deposition processes -- 9. Ion implantation and device isolation -- 10. Diffusion in III-V compound semiconductors -- 11. Ohmic contacts -- 12. Schottky diodes and FET processing -- 13. HEMT process -- 14. HBT processing -- 15. BiFET and BiHEMT processing -- 16. MOSFET processing -- 17. Passive components -- 18. Interconnect technology -- 19. Backend processing and through-wafer vias -- 20. Electroplating -- 21. Measurements and characterization -- 22. Reliability -- 23. GaN devices -- 24. RF MEMS.
- Subject(s):
- Genre(s):
- ISBN:
- 9789814669313 (ebook : PDF)
- Bibliography Note:
- Includes bibliographical references and index.
- Other Forms:
- Also available in print format.
View MARC record | catkey: 17943727