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Dry etching for microelectronics [electronic resource] / edited by Ronald A. Powell
Published:
Amsterdam ; New York : North-Holland Physics Pub. ; New York, N.Y. : Distributors for the USA and Canada, Elsevier Science Pub. Co., 1984.
Physical Description:
xi, 299 p. : ill. ; 24 cm.
Additional Creators:
Powell, Ronald A.
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Series:
Materials processing, theory and practices ; v. 4.
Restrictions on Access:
License restrictions may limit access.
Subject(s):
Semiconductors
—
Etching
Plasma etching
Genre(s):
Electronic books
ISBN:
0444869050
Note:
Includes index.
Bibliography Note:
Bibliography: p. 223-294.
View MARC record
| catkey: 17952861