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Metal impurities in silicon-device fabrication / Klaus Graff

Author:: Graff, Klaus, 1931-
Published:: Berlin ; New York : Springer-Verlag, [1995]
Copyright Date:: ©1995
Physical Description:: ix, 216 pages : illustrations ; 25 cm.

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Series:

Springer series in materials science ; 24

Subject(s):

ISBN:

3540583173 (Berlin : acid-free paper)
0387583173 (New York : acid-free paper)

Bibliography Note:

Includes bibliographucal references (pages 201-214) and index.

View MARC record | catkey: 1821419