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Metal impurities in silicon-device fabrication / Klaus Graff
Author:
Graff, Klaus, 1931-
Published:
Berlin ; New York : Springer-Verlag, [1995]
Copyright Date:
©1995
Physical Description:
ix, 216 pages : illustrations ; 25 cm.
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Series:
Springer series in materials science ; 24
Subject(s):
Semiconductors
—
Defects
Silicon
—
Inclusions
Silicon
—
Defects
ISBN:
3540583173 (Berlin : acid-free paper)
0387583173 (New York : acid-free paper)
Bibliography Note:
Includes bibliographucal references (pages 201-214) and index.
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| catkey: 1821419