Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics / by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz
- Williams, Michael E., 1949-
- Park Ridge, N.J., U.S.A. : Noyes Publications, 
- Copyright Date:
- Physical Description:
- xv, 348 pages : illustrations ; 25 cm.
- Additional Creators:
- Baldwin, David G.
Manz, Paul C.
Full Text available online
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- Materials science and process technology series. Electronic materials and process technology
- Bibliography Note:
- Includes bibliographical references (pages 306-307) and index.
View MARC record | catkey: 1862925