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Microengineering technology for space systems / edited by Henry Helvajian
Published
Los Angeles, CA : Aerospace Corp., [1997]
Copyright Date
©1997
Physical Description
ix, 209 pages : illustrations ; 28 cm.
Full Text available online
Availability
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Series
Monograph (Aerospace Press) ; 97-02.
Subject(s)
Integrated circuits
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Very large scale integration
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Design and construction
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Congresses
Microlithography
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Congresses
Nanostructured materials
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Congresses
Bibliography Note
Includes bibliographical references.
View MARC record
| catkey: 1864336