Microlithography and metrology in micromachining : 23-24 October, 1995, Austin, Texas / Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

Published:: Bellingham, Wash., USA : SPIE, [1995]
Copyright Date:: ©1995
Physical Description:: ix, 246 pages : illustrations ; 28 cm.
Additional Creators:: Postek, Michael T. and Society of Photo-optical Instrumentation Engineers

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ISBN:

0819420069

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Includes bibliographic references and author index.

View MARC record | catkey: 1996341