Lithographic and micromachining techniques for optical component fabrication : 29-30 July 2001, San Diego, USA / Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

Published:: Bellingham, Wash., USA : SPIE, [2001]
Copyright Date:: ©2001
Physical Description:: x, 324 pages : illustrations ; 28 cm.
Additional Creators:: Kley, Ernst-Bernhard, Herzig, Hans Peter, and Society of Photo-optical Instrumentation Engineers

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ISBN:

0819441546

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Includes bibliographical references and index.

View MARC record | catkey: 2262596