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Process monitoring in semiconductor manufacturing using non-contact electrical characterization of silicon surfaces / Paul Alexander Roman
Author
Roman, Paul Alexander
Published
[Place of publication not identified] : [publisher not identified], 2000.
Physical Description
120 leaves : illustrations
Full Text available online
Availability
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Graduate Program
Electrical Engineering
Dissertation Note
Ph.D. Pennsylvania State University 2000.
Reproduction Note
Microfilm (positive). 1 reel 35 mm. (University Microfilms 99-98420)
View MARC record
| catkey: 2263968