Actions for Emerging lithographic technologies VI : 5-7 March, 2002, Santa Clara, [California], USA

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Emerging lithographic technologies VI : 5-7 March, 2002, Santa Clara, [California], USA / Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH

Published
Bellingham, Washington : SPIE, c2002.
Physical Description
2 v. (xiv, 950 p.) : ill. ; 28 cm.
Additional Creators
Engelstad, Roxann L., Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, and International SEMATECH (Organization)

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