Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA / Alexander Starikov, Kenneth W. Tobin, Jr., chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
- Bellingham, Wash., USA : SPIE, 
- Copyright Date:
- Physical Description:
- xv, 628 pages : illustrations (some color) ; 28 cm.
- Additional Creators:
- Starikov, Alexander, 1952-
Tobin, Kenneth W.
Society of Photo-optical Instrumentation Engineers
- SPIE proceedings series, 0277-786X ; v. 4692
- Bibliography Note:
- Includes bibliographical references and index.
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