Fabrication method for small-scale structures with non-planar features [electronic resource].

Published:: Washington, D.C. : United States. Dept. of Energy, 2016.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy
Additional Creators:: Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information

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Summary:

The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.

Report Numbers:

E 1.99:9,448,336
9,448,336

Subject(s):

Note:

Published through SciTech Connect.
09/20/2016.
"9,448,336"
"14/548,070"
David Bruce Burckel; Gregory A. Ten Eyck.

Funding Information:

AC04-94AL85000

View MARC record | catkey: 23766919