Micromachined force-balance feedback accelerometer with optical displacement detection [electronic resource].

Published:: Washington, D.C. : United States. Dept. of Energy, 2014.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy
Additional Creators:: Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information

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Summary:

An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.

Report Numbers:

E 1.99:8,783,106
8,783,106

Subject(s):

Engineering

Note:

Published through SciTech Connect.
07/22/2014.
"8,783,106"
"13/324,012"
Nielson, Gregory; Langlois, Eric; Baker, Michael; Okandan, Murat; Anderson, Robert.

Funding Information:

AC04-94AL85000

View MARC record | catkey: 23767328