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Method for fabricating a microelectromechanical resonator [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 2013.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy
Additional Creators
Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
A method is disclosed which calculates dimensions for a MEM resonator in terms of integer multiples of a grid width G for reticles used to fabricate the resonator, including an actual sub-width L.sub.a=NG and an effective electrode width W.sub.e=MG where N and M are integers which minimize a frequency error f.sub.e=f.sub.d-f.sub.a between a desired resonant frequency f.sub.d and an actual resonant frequency f.sub.a. The method can also be used to calculate an overall width W.sub.o for the MEM resonator, and an effective electrode length L.sub.e which provides a desired motional impedance for the MEM resonator. The MEM resonator can then be fabricated using these values for L.sub.a, W.sub.e, W.sub.o and L.sub.e. The method can also be applied to a number j of MEM resonators formed on a common substrate.
Report Numbers
E 1.99:8,367,305
8,367,305
Subject(s)
Note
Published through SciTech Connect.
02/05/2013.
"8,367,305"
"12/884,237"
Wojciechowski, Kenneth; Olsson, III, Roy.
Funding Information
AC04-94AL85000
View MARC record | catkey: 23767860