Actions for Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom [electronic resource].

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Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 2007.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy
Additional Creators
Sandia National Laboratories, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
A microelectromechanical (MEM) apparatus is disclosed which includes a pair of tensile-stressed actuators suspending a platform above a substrate to tilt the platform relative to the substrate. A tensile stress built into the actuators initially tilts the platform when a sacrificial material used in fabrication of the MEM apparatus is removed. Further tilting of the platform can occur with a change in the ambient temperature about the MEM apparatus, or by applying a voltage to one or both of the tensile-stressed actuators. The MEM apparatus can be used to form a tiltable micromirror or an array of such devices, and also has applications for thermal management within satellites.
Report Numbers
E 1.99:7,159,397
7,159,397
Subject(s)
Note
Published through SciTech Connect.
01/09/2007.
"7,159,397"
"11/146,811"
Fleming, James.
Funding Information
AC04-94AL85000
View MARC record | catkey: 23769034