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Modeling MEMS and NEMS / John A. Pelesko and David H. Bernstein
Author:
Pelesko, John A.
Published:
Boca Raton, FL : Chapman & Hall/CRC, ©2003.
Physical Description:
1 online resource (xxiii, 357 pages) : illustrations, text file, PDF
Additional Creators:
Bernstein, David H.
Access Online
ezaccess.libraries.psu.edu
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Subject(s):
Microelectromechanical systems
—
Mathematical models
Genre(s):
Electronic books
ISBN:
9781420035292 (e-book : PDF)
9781584883067 (hardback)
Bibliography Note:
Includes bibliographical references (pages 325-340) and index.
Other Forms:
Also available in print format.
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| catkey: 23786979