Rapid Evaluation of Particle Properties using Inverse SEM Simulations [electronic resource].
- Washington, D.C. : United States. National Nuclear Security Administration, 2016. and Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy
- Physical Description:
- 53 pages : digital, PDF file
- Additional Creators:
- Oak Ridge National Laboratory, United States. National Nuclear Security Administration, and United States. Department of Energy. Office of Scientific and Technical Information
- Restrictions on Access:
- Free-to-read Unrestricted online access
- This report is the final deliverable of a 3 year project whose purpose was to investigate the possibility of using simulations of X-ray spectra generated inside a scanning electron microscope (SEM) as a means to perform quantitative analysis of the sample imaged in the SEM via an inverse analysis methodology. Using the nine point Technology Readiness Levels (TRL) typically used by the US Department of Defense (DOD) and the National Aeronautics and Space Administration (NASA), this concept is now at a TRL of 3. In other words, this work has proven the feasibility of this concept and is ready to be further investigated to address some of the issues highlighted by this initial proof of concept.
- Published through SciTech Connect., 01/01/2016., "ornl/tm--2015/779", "NN2001000", "NNPORES", and Kursat B. Bekar; Thomas Martin Miller; Bruce W. Patton; Charles F. Weber.
- Funding Information:
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