Silicon Carbide Film Growth Final Report CRADA No. TC-1060-94 [electronic resource].

Published: Washington, D.C. : United States. Dept. of Energy, 2018.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy
Physical Description: PDF-file: 7 pages; size: 0.3 Mbytes
Additional Creators: Lawrence Berkeley National Laboratory, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information