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Apparatus for generating partially coherent radiation [electronic resource].

Published
Washington, D.C. : United States. Dept. of Energy, 2005.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy
Additional Creators
Lawrence Berkeley National Laboratory, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
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Summary
Techniques for generating partially coherent radiation and particularly for converting effectively coherent radiation from a synchrotron to partially coherent EUV radiation suitable for projection lithography.
Report Numbers
E 1.99:6,859,263
6,859,263
Subject(s)
Note
Published through SciTech Connect.
02/22/2005.
"6,859,263"
"10/377,947"
Naulleau, Patrick.
Funding Information
AC03-76SF00098
View MARC record | catkey: 24050564