Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat [electronic resource].
- Washington, D.C. : United States. Dept. of Energy. Office of Basic Energy Sciences, 2017. and Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy
- Physical Description:
- pages 575-581 : digital, PDF file
- Additional Creators:
- Argonne National Laboratory, United States. Department of Energy. Office of Basic Energy Sciences, National Science Foundation (U.S.), United States. Office of the United States Secretary of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
- Directed self-assembly (DSA) of the domain structure in block copolymer (BCP) thin films is a promising approach for sub-10-nm surface patterning. DSA requires the control of interfacial properties on both interfaces of a BCP film to induce the formation of domains that traverse the entire film with a perpendicular orientation. Here we show a methodology to control the interfacial properties of BCP films that uses a polymer topcoat deposited by initiated chemical vapour deposition (iCVD). The iCVD topcoat forms a crosslinked network that grafts to and immobilizes BCP chains to create an interface that is equally attractive to both blocks of the underlying copolymer. The topcoat, in conjunction with a chemically patterned substrate, directs the assembly of the grating structures in BCP films with a half-pitch dimension of 9.3 nm. As the iCVD topcoat can be as thin as 7 nm, it is amenable to pattern transfer without removal. As a result, the ease of vapour-phase deposition, applicability to high-resolution BCP systems and integration with pattern-transfer schemes are attractive properties of iCVD topcoats for industrial applications.
- Published through SciTech Connect., 03/27/2017., "128753", Nature Nanotechnology 12 6 ISSN 1748-3387 AM, and Hyo Seon Suh; Do Han Kim; Priya Moni; Shisheng Xiong; Leonidas E. Ocola; Nestor J. Zaluzec; Karen K. Gleason; Paul F. Nealey.
- Funding Information:
View MARC record | catkey: 24055055