Export to Refworks Export to EndNote Email
Report an Issue

Optical method and system for the characterization of laterally-patterned samples in integrated circuits [electronic resource].

Published:
Washington, D.C. : United States. Dept. of Energy, 2011.
Oak Ridge, Tenn. : Distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy
Additional Creators:
Brown University, United States. Department of Energy, and United States. Department of Energy. Office of Scientific and Technical Information
Access Online

Availability

I Want It

Finding items...

Restrictions on Access:
Free-to-read Unrestricted online access
Summary:
Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
Report Numbers:
E 1.99:7,894,070
7,894,070
Subject(s):
Note:
Published through SciTech Connect.
02/22/2011.
"7,894,070"
"US patent application 12/854,425"
Maris, Humphrey J. (Barrington, RI).
Funding Information:
FG02-86ER45267
View MARC record | catkey: 24096115