MEMS/MOEMS components and their applications : 26-27 January, 2004, San Jose, California, USA / Siegfried W. Janson, Albert K. Henning, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Published: Bellingham, Wash. : SPIE, [2004]
Copyright Date: ©2004
Physical Description: xxxi, 232 pages : illustrations ; 28 cm.
Additional Creators: Janson, Siegfried W., Henning, Albert Karl, and Society of Photo-optical Instrumentation Engineers