Spreading Resistance Profiles in Gallium Arsenide / RG. Mazur, RJ. Hillard
- Conference Author
- Semiconductor Fabrication: Technology and Metrology (1988 : Santa Clara, California)
- Physical Description
- 1 online resource (17 pages) : illustrations, figures, tables
- Additional Creators
- Mazur, RG., Hillard, RJ., American Society for Testing and Materials, and ASTM International
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- Subscription required for access to full text.
License restrictions may limit access. - Summary
- The spreading resistance technique is widely used for profiling carrier concentration and resistivity in a variety of silicon structures. Several authors have reported some success in applying the spreading resistance technique to profiling doped GaAs samples. However, the use of spreading resistance measurements on GaAs is not widespread. The primary reasons for this are experimental problems with sample surface preparation and the very high values of contact resistance found in point contacts to GaAs. This paper details modifications to the spreading resistance technique to obtain reproducible and stable results on a variety of GaAs structures. It also discusses the current limits of such measurements.
- Dates of Publication and/or Sequential Designation
- Volume 1989, Issue 990 (January 1989)
- Subject(s)
- Other Subject(s)
- ISBN
- 9780803151079 (e-ISBN)
9780803112735
0803112734 - Digital File Characteristics
- text file PDF
- Bibliography Note
- Includes bibliographical references 7.
- Other Forms
- Also available online via the World Wide Web. Tables of contents and abstracts freely available; full-text articles available by subscription.
Full text article also available for purchase.
Also available in PDF edition. - Reproduction Note
- Electronic reproduction. W. Conshohocken, Pa. : ASTM International, 1989. Mode of access: World Wide Web. System requirements: Web browser. Access may be restricted to users at subscribing institutions.
- Technical Details
- Mode of access: World Wide Web.
- Source of Acquisition
- ASTM International PDF Purchase price USD25.
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