Actions for Electron spin resonance observation of trapping centers in atomic layer deposited hafnium oxide on silicon

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Electron spin resonance observation of trapping centers in atomic layer deposited hafnium oxide on silicon / by Andrew Y. Kang

Author
Kang, Andrew Y.
Published
[Place of publication not identified] : [publisher not identified], 2004.
Physical Description
32 leaves : illustrations

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Graduate Program
Dissertation Note
M.S. Pennsylvania State University 2004.
Reproduction Note
Library holds archival microfiches negative and service copy. 1 fiche. (Micrographics International, 2004)
View MARC record | catkey: 2800563