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Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg
Author:
Lieberman, M. A. (Michael A.)
Published:
Hoboken, N.J. : Wiley-Interscience, [2005]
Copyright Date:
©2005
Edition:
2nd ed.
Physical Description:
xxxv, 757 pages : illustrations ; 25 cm
Additional Creators:
Lichtenberg, Allan J.
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Subject(s):
Plasma dynamics
Thin films
—
Surfaces
Plasma etching
Plasma chemistry
—
Industrial applications
ISBN:
0471720011 (acid-free paper)
Bibliography Note:
Includes bibliographical references (pages 735-748) and index.
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| catkey: 2831936