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Principles and applications of NanoMEMS physics / by Héctor J. De Los Santos
Author:
Santos, Héctor J. de los
Published:
Dordrecht, The Netherlands : Springer, [2005]
Copyright Date:
©2005
Physical Description:
xv, 254 pages : illustrations ; 25 cm.
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Series:
Microsystems (Series) ; v. 15.
Contents:
Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics.
Subject(s):
Quantum electronics
Wave-particle duality
Nanotechnology
Microelectromechanical systems
ISBN:
1402032382
Bibliography Note:
Includes bibliographical references (pages [241]-252) and index.
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| catkey: 3021660