A computer program for analysis of data from microelectronic test structures / R. L. Mattis; L. J. Till; R. C. Frisch

Author:: Mattis, Richard L.
Published:: Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1982.
Physical Description:: 1 online resource
Additional Creators:: Frisch, R. C., Mattis, Richard L., Till, L. J., and United States. National Bureau of Standards