Micro-electro-mechanical systems, 2004 [electronic resource] : presented at 2004 ASME International Mechanical Engineering Congress and Exposition : November 13-19, 2004, Anaheim, California USA / sponsored by the Micro-Electro-Mechanical Systems Division, ASME
- New York, N.Y. : ASME, c2004.
- Physical Description:
- ix, 512 p. : ill. ; 28 cm.
- Additional Creators:
- American Society of Mechanical Engineers. Micro-Electro-Mechanical Systems Division and International Mechanical Engineering Congress and Exposition (2004 : Anaheim, Calif.)
- MEMS ; vol. 6
- Restrictions on Access:
- License restrictions may limit access.
- 0791847144 (pbk.)
- "Book number: H01299"--P. 512.
- Bibliography Note:
- Includes bibliographical references and author index.
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