Dielectric barrier discharge (DBD) excimer lamps emit vacuum-UV optical radiation. This work presents novel methods for efficiently operating DBDs with short, high-voltage pulses. Transformer-less systems utilising SiC power semiconductor switches are presented. Pulse frequencies of up to 3.1 MHz and peak inverter efficiencies of 92 % were achieved. The work encloses both mathematical backgrounds of pulsed resonant circuits and practical implementation of low-inductive power stages.