Advanced materials and processes for VLSI : Semicon/East 1985 technical program proceedings, September 17-19, 1985, Bayside Exposition Center, Boston, Massachusetts / Presented by Semiconductor Equipment and Materials Institute
- Conference Author:
- Semicon/East, (1985 : Boston, Mass)
- Mountain View, California : Semiconductor Equipment and Materials Institute, Inc., 1985.
- Physical Description:
- ix, 122 pages : illustrations ; 28 cm
- Additional Creators:
- Semiconductor Equipment and Materials Institute
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- Bibliography Note:
- Includes bibliographies.
- Action Note:
- committed to retain 20170930 20430101 HathiTrust https://www.hathitrust.org/shared_print_program
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