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Optical and EUV lithography : a modeling perspective / Andreas Erdmann

Author
Erdmann, Andreas
Published
Bellingham : SPIE--The International Society for Optical Engineering, 2021.
Physical Description
1 online resource
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Contents
Preface -- Abbreviations and acronyms -- Frequently used symbols -- 1. Overview of lithographic processing -- 2. Image formation in projection lithography -- 3. Photoresists -- 4. Optical resolution enhancements -- 5. Material-driven resolution enhancements -- 6. Lithography with extreme-ultraviolet light -- 7. Optical lithography beyond projection imaging -- 8. Lithographic projection systems: advanced topics -- 9. Mask and wafer topography effects in lithography -- 10. Stochastic effects in advanced lithography -- Index.
Summary
"State-of-the-art semiconductor lithography combines the most advanced optical systems of our world with cleverly designed and highly optimized photochemical materials and processes to fabricate micro- and nanostructures that enable our modern information society. The precise fabrication and metrology of nanopatterns requires an in depth understanding of all involved physical and chemical effects. This book tries to support such understanding from a modeling-driven perspective, but without a heavy mathematical apparatus. The material for this book was compiled in many years of teaching lectures on "Optical lithography Technology, Physical Effects, and Modeling" at the Friedrich-Alexander-University Erlangen-Nuremberg and in the preparation of dedicated courses on special aspects of lithography. The book is intended to help interested students with background in physics, optics, computational engineering, mathematics, chemistry, material science, nanotechnology and other areas to get started in the fascinating field of lithographic techniques for nanofabrication. It should also help senior engineers and managers to widen their view on alternative methods and applications"--
Subject(s)
ISBN
9781510639027 (pdf)
1510639020 (pdf)
9781510639010 (paperback)
1510639012 (paperback)
Bibliography Note
Includes bibliographical references and index.
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