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Methods of measurement for semiconductor materials, process control, and devices. / W. Murray Bullis
Author:
Bullis, W. Murray
Published:
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1968.
Physical Description:
1 online resource
Additional Creators:
Bullis, W. Murray
and
United States. National Bureau of Standards
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Series:
NBS technical note ; 472
Restrictions on Access:
Free-to-read Unrestricted online access
Report Numbers:
C 13.46:472
Note:
1968.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Bibliography Note:
Includes bibliographical references.
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| catkey: 34154073