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Methods of measurement for semiconductor materials, process control, and devices. / W. Murray Bullis

Author:: Bullis, W. Murray
Published:: Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1968.
Physical Description:: 1 online resource
Additional Creators:: Bullis, W. Murray and United States. National Bureau of Standards

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Series:

NBS technical note ; 472

Restrictions on Access:

Free-to-read Unrestricted online access

Report Numbers:

C 13.46:472

Note:

1968.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.

Bibliography Note:

Includes bibliographical references.

View MARC record | catkey: 34154073