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Methods of measurement for semiconductor materials, process control, and devices. / W. Murray Bullis

Author
Bullis, W. Murray
Published
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1968.
Physical Description
1 online resource
Additional Creators
Bullis, W. Murray and United States. National Bureau of Standards
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Restrictions on Access
Free-to-read Unrestricted online access
Report Numbers
C 13.46:472
Note
1968.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Bibliography Note
Includes bibliographical references.
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View MARC record | catkey: 34154073