Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A. / editors, B.J. Pawlak [and others].
- Additional Titles:
- Sub-second rapid thermal processing for device fabrication
- Warrendale, Pa. : Materials Research Society, 
- Copyright Date:
- Physical Description:
- xi, 213 pages : illustrations ; 24 cm.
- Additional Creators:
- Pawlak, B. J. (Bartek J.)
Materials Research Society. Fall Meeting (2006 : San Francisco, Calif.)
Symposium on Sub-Second Rapid Thermal Processing for Device Fabrication (2006 : Francisco, Calif.)
Full Text available online
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- Materials Research Society symposium proceedings ; v. 912
- "This volume contains papers presented at Symposium C, 'Sub-Second Rapid Thermal Processing for Device Fabrication,' held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.
- Bibliography Note:
- Includes bibliographical references and indexes.
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