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Scanning Electron Microscopy

Published
IntechOpen 2012
Physical Description
1 electronic resource (844 p.)
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Language Note
English
Restrictions on Access
Free-to-read Unrestricted online access
Summary
Today, an individual would be hard-pressed to find any science field that does not employ methods and instruments based on the use of fine focused electron and ion beams. Well instrumented and supplemented with advanced methods and techniques, SEMs provide possibilities not only of surface imaging but quantitative measurement of object topologies, local electrophysical characteristics of semiconductor structures and performing elemental analysis. Moreover, a fine focused e-beam is widely used for the creation of micro and nanostructures. The book's approach covers both theoretical and practical issues related to scanning electron microscopy. The book has 41 chapters, divided into six sections: Instrumentation, Methodology, Biology, Medicine, Material Science, Nanostructured Materials for Electronic Industry, Thin Films, Membranes, Ceramic, Geoscience, and Mineralogy. Each chapter, written by different authors, is a complete work which presupposes that readers have some background knowledge on the subject.
Other Subject(s)
ISBN
1973
9789535100928
Collection
DOAB Library.
Terms of Use and Reproduction
All rights reserved http://oapen.org/content/about-rights
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