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Properties of tantalum nitride as a diffusion barrier

Author
Crookshank, Mark E.
Published
[Place of publication not identified] : [publisher not identified], 1988.
Physical Description
57 leaves

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Graduate Program
Dissertation Note
M.S. Pennsylvania State University.
Reproduction Note
Library holds archival microfiche negative and service copy, (Micrographics International, 1988).
View MARC record | catkey: 370920