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Principles of lithography / Harry J. Levinson

Author
Levinson, Harry J.
Published
Bellingham, Wash. : SPIE Press, [2010]
Copyright Date
©2010
Edition
3rd ed.
Physical Description
1 online resource (xiv, 503 pages) : illustrations (some color).
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Series
Language Note
English.
Contents
Preface to the third edition -- Preface to the second edition -- Preface -- Chapter 1. Overview of lithography -- Chapter 2. Optical pattern formation -- Chapter 3. Photoresists -- Chapter 4. Modeling and thin-film effects -- Chapter 5. Wafer steppers -- Chapter 6. Overlay -- Chapter 7. Masks and reticles -- Chapter 8. Confronting the diffraction limit -- Chapter 9. Metrology -- Chapter 10. Immersion lithography and the limits of optical lithography -- Chapter 11. Lithography costs -- Chapter 12. Extreme ultraviolet lithography -- Chapter 13. Alternative lithography techniques -- Appendix A: Coherence.
Summary
The publication of Principles of Lithography, Third Edition just five years after the previous edition is evidence of the quickly changing and exciting nature of lithography as applied to the production of integrated circuits and other micro- and nanoscale devices. This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography from the lab to development pilot lines. New references and homework problems are included. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
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Genre(s)
ISBN
9780819483256 (electronic bk.)
0819483257 (electronic bk.)
9781628700107 (electronic bk.)
1628700106 (electronic bk.)
1680150995
9781680150995
9780819483249
0819483249
Bibliography Note
Includes bibliographical references and index.
View MARC record | catkey: 39313771