Actions for Practical optical dimensional metrology

Email RIS file
Bookmark
Report an Issue

Practical optical dimensional metrology / Kevin G. Harding

Author
Harding, Kevin G.
Published
Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2019.
Physical Description
1 online resource (xii, 228 pages).
Additional Creators
Society of Photo-Optical Instrumentation Engineers
Access Online

Availability

I Want It
I Want It

Finding items...

Series
Contents
Preface -- 1. Introduction to metrology: 1.1. Basic terms; 1.2. Methods of optical metrology; References -- 2. Light-intensity-based metrology: 2.1. Light, optics, and machine vision technology; 2.2. Where to use intensity-based methods; 2.3. Sources of errors; References -- 3. Triangulation and shift-based metrology: 3.1. Stereo imaging; 3.2. Active triangulation; 3.3. 3D phase-based measurements; 3.4. Summary of triangulation and phase shift methods; References -- 4. Focus-based optical metrology: 4.1. Introduction to focus-based methods; 4.2. Point-based distance measurement; 4.3. Area-based focus metrology methods; 4.4. Focus-based metrology summary; References -- 5. Light-characteristic-based dimensional measurements: 5.1. Introduction to light characteristics; 5.2. Polarization-based dimensional metrology; 5.3. Light-scatter-based measurements; 5.4. Color-based measurements; References -- 6. Portable and hybrid gages: 6.1. Introduction to portable and hybrid gages; 6.2. Measurement of large structures; 6.3. Measurement of mid- to large-size durable assets; 6.4. High-precision hybrid systems; 6.5. Summary of hybrid gages; References -- 7. Finding the right technology for the application: 7.1. Introduction; 7.2. Low-precision applications,10 mm; 7.3. Large objects and assemblies,1 mm; 7.4. General manufacturing applications,0.1 mm; 7.5. Precision manufactured parts,0.01 mm; 7.6. Micro-feature metrology,0.001 mm; 7.7. Nano-features,0.0001 mm; 7.8. Summary of application comparisons and 8. Part location: 8.1. Part location applications; 8.2. Large parts measured to,10-mm resolution; 8.3. Composite layup monitoring; 8.4. Part location summary of options; References -- 9. Optimized measurement of gaps: 9.1. The application,0.1 mm; 9.2. Elimination of methods that are not suitable; 9.3. Laser line triangulation; 9.4. 3D triangulation; 9.5. Chromatic confocal method; 9.6. Comparison tests; 9.7. Comparison of methods; 9.8. Summary of options; References -- 10. Measurement of small holes: 10.1. The application,0.01 mm; 10.2. Laser line structured light (static); 10.3. Scanning-laser-line or multiple-laser-line probe; 10.4. Phase-shifted structured light; 10.5. Conoscopic point probe; 10.6. Confocal point probe; 10.7. Digital optical comparator (2D); 10.8. Depth from focus microscopy; 10.9. Depth from defocus microscopy; 10.10. Summary of options; References -- 11. Three-dimensional metrology for printed electronics: 11.1. The application,0.001 mm; 11.2. Laser line structured light (static); 11.3. Phase-shifted structured light; 11.4. Confocal point probes; 11.5. Depth from focus or defocus microscopy; 11.6. Artifact-based verification; 11.7. Conclusions; References -- 12. Industrial surface finish method comparison for fine finish measurements: 12.1. The application,0.0001 mm; 12.2. Interferometry; 12.3. Focus-based systems; 12.4. Confocal systems; 12.5. Scatter-based systems; 12.6. Comparison of methods; 12.7. Summary of options; References -- Index.
Summary
Practical Optical Dimensional Metrology provides basic explanations of the operation and application of the most common methods in the field and in commercial use. The first half of the book presents a working knowledge of the mechanism and limitations of optical dimensional measurement methods that use: light level changes, two-dimensional imaging, triangulation, structured-light patterns, interference patterns, optical focus, light characteristics such as polarization, and hybrid methods with mechanical or other measurement tools. The book concludes with a series of manufacturing application examples that look at measurements from the centimeter range down to the nanometer range.
Subject(s)
Genre(s)
ISBN
9781510622944 (pdf)
1510622942 (pdf)
9781510622937 (softcover ; alk. paper)
9781510622951 (epub)
9781510622968 (kindle/mobi)
Note
Title from PDF title page (SPIE eBooks Website, viewed 2018-12-19).
Bibliography Note
Includes bibliographical references and index.
View MARC record | catkey: 39317483