Physical profile measurements in insulating layers using the ion analyser

Author: Bernard, J.
Published: France : [publisher not identified], 1973.
[Oak Ridge, Tennessee] : [U.S. Atomic Energy Commission], 1973.
Physical Description: microfiche : negative ; 11 x 15 cm
Additional Creators: Bruel, M., Combasson, J. L., Guernet, G., and Hilleret, N.