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Actions for Ion implantation using nuclear reactions
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Ion implantation using nuclear reactions
Author
Guernet, G.
Published
France : [publisher not identified], 1972.
[Oak Ridge, Tennessee] : [U.S. Atomic Energy Commission], 1972.
Physical Description
microfiche : negative ; 11 x 15 cm
Additional Creators
Bontemps, A.
,
Ligeon, E.
, and
Marine, J.
Full Text available online
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Language Note
In French.
Report Numbers
CEA-CONF-2246; CONF-720990-6
Other Subject(s)
Activation analysis
Alpha beams
Alpha particles
Annealing
Backscattering
Boron 11.
Boron ions
Channeling
Crystal doping
Doped materials
Kev range 10-100
Kev range 100-1000
Optimization
Proton reactions
Spatial distribution
Surfaces silicon
Tellurides- zinc compounds
Collection
U.S. Atomic Energy Commission depository collection.
Note
NSA number: NSA-28-013348
OSTI Identifier 4462152
Research organization: Originating Research Org. not identified.
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