Antimony-silicate glass in the planar diffusion source process for doping silicon

Author: Treat, Carol J.
Published: [Place of publication not identified] : [publisher not identified], 1988.
Physical Description: 61 leaves

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Graduate Program

Dissertation Note

M.S. Pennsylvania State University.

Reproduction Note

Library holds archival microfiche negative and service copy, (Micrographics International, 1988).

View MARC record | catkey: 432923

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