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Resonant network antennas for radio-frequency plasma sources : theory, technology and applications / Philippe Guittienne, Alan Howling, Ivo Furno

Author
Guittienne, Philippe
Published
Bristol [England] (Temple Circus, Temple Way, Bristol BS1 6HG, UK) : IOP Publishing, [2024]
Physical Description
1 online resource (various pagings) : illustrations (some color).
Additional Creators
Howling, Alan, Furno, Ivo, and Institute of Physics (Great Britain)
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Contents
1. Introduction -- 1.1. Resonant network antennas... -- 1.2. ...for radio-frequency plasma sources -- 1.3. Evolution of the antenna design -- 1.4. Why use resonant network antennas? -- 1.5. Outline of the book, part I. Resonant network antennas without plasma. 2 Introduction to resonant circuits -- 2.1. Definitions and conventions -- 2.2. Parallel resonant circuits -- 2.3. From lumped element inductor to transmission line, 3. Normal modes and dissipative networks -- 3.1. Experimental set-up of the ladder antenna -- 3.2. Introduction to normal modes -- 3.3. General solution for the network currents -- 3.4. Normal mode solution for open networks -- 3.5. Dissipative networks : Helyssen plasma sources -- 3.6. Application : frequency resolution of MRI antennas -- 3.7. Chapter summary, 4. Partial inductance and the matrix model -- 4.1. A brief history of inductance : loop and partial -- 4.2. Can the self inductance of a wire be measured? -- 4.3. Definition of partial inductance -- 4.4. Calculation of the partial inductance of wires -- 4.5. Relevant special cases of partial inductance -- 4.6. Antenna equivalent circuit including mutual partial inductance -- 4.7. Mutual partial inductance matrix equations -- 4.8. Experiment and theory for an antenna without plasma -- 4.9. Conclusions for part I, part II. Resonant network antennas in non-magnetized plasma. 5. Introduction to inductively coupled plasma -- 5.1. RF plasma generalities -- 5.2. RF plasma sources in non-magnetized plasma -- 5.3. Skin depth in inductively coupled plasma -- 5.4. Transformer model for inductively coupled plasma -- 5.5. Prohibitively high voltages in large area ICP -- 5.6. Chapter summary for the introduction to ICP, 6. Inductive coupling using plane plasma sources -- 6.1. Introduction to planar ICP sources -- 6.2. Experimental set-up for an ICP ladder resonant antenna -- 6.3. Plasma performance of an ICP ladder resonant antenna -- 6.4. Induced currents in the plasma : the complex image method -- 6.5. Application : RF biasing for plasma deposition -- 6.6. Chapter summary for inductive, plane plasma sources, 7. Electromagnetic coupling to plasma in large antennas -- 7.1. Electromagnetic effects in large area antennas -- 7.2. Experimental set-up for large area antennas -- 7.3. Single conductor lossy transmission line -- 7.4. Multi-conductor transmission line (MTL) -- 7.5. Experiment and MTL model for the vacuum case -- 7.6. Experiment and MTL model with plasma loading -- 7.7. Applications of EM-coupled antennas -- 7.8. Chapter summary for EM -coupled antennas, 8. Cylindrical wave functions in birdcage antennas -- 8.1. A general wavefield solution for birdcage antennas -- 8.2. Vacuum wavefields for a m = 1 shell current inside a PEC screen -- 8.3. Vacuum wavefields of a birdcage within a PEC screen -- 8.4. Plasma coupling by a shell current within a PEC screen -- 8.5. Image method for birdcage antennas -- 8.6. Chapter summary for wavefields in birdcage antennas, 9. Inductive plasma generated by a birdcage antenna -- 9.1. Birdcage construction -- 9.2. Normal modes on closed networks -- 9.3. Applications of birdcage inductive antennas -- 9.4. Chapter summary for inductive birdcages, part III. Resonant network antennas in magnetized plasma. 10. Whistler waves in an infinite uniform magnetized plasma -- 10.1. Introduction and classification of plasma waves -- 10.2. Revision of polarization in magnetized plasma -- 10.3. Conductivity and permittivity tensors in uniform magnetoplasma -- 10.4. Plane wave dispersion relations in collisionless magnetoplasma -- 10.5. Solution of the principal wave dispersion relations -- 10.6. Wave number parallel to the magnetic field -- 10.7. Electromagnetic electron wave cut-offs and resonances -- 10.8. Unbounded collisionless motion at the electron cyclotron resonance : explicit time solution -- 10.9. Bounded collisional motion : explicit time solution -- 10.10. Whistler propagation, or evanescence and reflection in collisionless plasma -- 10.11. Two approximate methods for an arbitrary angle of plane waves in magnetized plasma -- 10.12. Chapter summary for whistler waves in uniform, magnetized plasma, 11. Helicon modes in a magnetized plasma column -- 11.1. Introduction to the helicon mode equations -- 11.2. Normal mode solutions for uniform plasma density -- 11.3. Normal mode solutions for radially non-uniform plasma -- 11.4. Chapter summary for helicon modes in a magnetized plasma, 12. Wave-sustained plasma -- 12.1. Bounded helicon discharge -- 12.2. Unbounded helicon discharges : the RAID experiment -- 12.3. Planar helicon plasma source -- 12.4. Applications of birdcage helicon antennas -- 12.5. Chapter summary for wave heated discharges, part IV. Technology, future developments, and appendices. 13. Technology of resonant network antennas -- 13.1. Impedance matching of resonant network antennas -- 13.2. Capacitor assemblies for high RF power antennas -- 13.3. Dimensioning the RF system -- 13.4. Antenna mechanical construction -- 13.5. High Q design -- 13.6. Chapter summary for the technology of resonant network antennas, 14. Future developments and applications -- 14.1. Hybrid design -- 14.2. Two-dimensional resonant network antennas -- 14.3. Phased antennas -- 14.4. Toroidal plasma generated by a birdcage antenna -- 14.5. Multiple birdcage antennas along a plasma column -- 14.6. Matchless antennas -- 14.7. Conclusions, and Appendix A. Expansions near resonance for the dissipative antenna -- Appendix B. Impedance matrix calculations -- Appendix C. Electron-molecule energy transfer fraction -- Appendix D. Maxwell's equations, plasma permittivity, and skin depth -- Appendix E. Theory of the complex image method -- Appendix F. Solution of the MTL equations for the EMCP antenna source -- Appendix G. Maxwell's potential coefficient matrix and the partial image method -- Appendix H. Impedance of a hybrid antenna with parasitic capacitance -- Appendix I. Cylindrical wave function constants -- Appendix J. Helicon mode derivations and methods -- Appendix K. Link to programs.
Summary
Resonant antennas are increasingly employed by the plasma industry, and the theory has now developed alongside the technological applications to the extent that it is timely to document the progress in this field to aid antenna design for future novel RF plasma sources. This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma. It describes industrial applications, and covers state-of-the-art research in helicon wave physics and sources with plasma diagnostics. The book is divided into four parts, covering resonant network antennas without plasma, antennas in magnetized and non-magnetized plasma, and finally, technology and future developments of resonant network antennas.Part of IOP Series in Plasma Physics.
Subject(s)
ISBN
9780750352963 ebook
9780750352956 mobi
9780750352949 print
9780750352970 myPrint
Audience Notes
Plasma physicist professionals and students, industrial R&D, semiconductor industry, fusion research, research scientists in general.
Note
"Version: 20240201"--Title page verso.
Bibliography Note
Includes bibliographical references.
Other Forms
Also available in print.
Technical Details
Mode of access: World Wide Web.
System requirements: Adobe Acrobat Reader, EPUB reader, or Kindle reader.
Biographical or Historical Sketch
Dr. Philippe Guittienne is a physicist at the Swiss Plasma Center (SPC) in the Basic Plasma Physics and Applications group under Prof. Ivo Furno, and founder of the Helyssen company in 2003. Following an engineering degree in physics (1997) and a doctorate (2002) in condensed matter physics at the EPFL on magnetization reversal in ferromagnetic nanostructures, he completely changed his field of interest to plasma physics with the idea of using resonant birdcages for helicon sources. He founded the Helyssen start-up in 2003, and started a collaboration with Dr. Christoph Hollenstein's group at the SPC for the development of resonant antennas as plasma sources. Dr. Alan Arthur Howling is an Adjoint Scientifique/Senior Scientific Collaborator, co-founder of the group for industrial plasmas in 1989 with Dr. Christoph Hollenstein. He is currently a researcher and lecturer in the Basic Plasma Physics and Applications group under Prof. Ivo Furno at the Swiss Plasma Center, EPFL, Lausanne, Switzerland. He obtained a physics degree from Oxford University in 1981, and a doctorate from both Oxford and UKAEA Culham Laboratory in 1985. A postdoc on TCA tokamak in the Centre de Recherches en Physique des Plasmas at the EPFL was the springboard to industrial plasma research for the last 35 years. Prof. Ivo Furno is Adjunct Professor at the EPFL and leader of the Basic Plasma Physics and Applications (BPPA) group of the Swiss Plasma Center. He graduated in Nuclear Engineering from the Politecnico di Torino, Italy, in 1995 and then he received his PhD from the EPFL. He continued with a Postdoc at the Los Alamos National laboratory, where he studied magnetic reconnection on the Reconnection Scaling Experiment (RSX), before re-joining the EPFL in 2006. His research is marked by the use of human-scale, dedicated plasma devices to investigate the fundamental physics of plasmas under conditions ranging from fusion plasmas to plasmas of relevance for solar physics and to non-equilibrium cold plasmas for industrial and biological applications.
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