Microelectronic structures and MEMS for optical processing IV [electronic resource] : 21-22 September, 1998, Santa Clara, California / M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others].
- Published
- Bellingham, Wash. : SPIE, [1998]
- Copyright Date
- ©1998
- Physical Description
- vii, 240 pages : illustrations ; 28 cm.
- Additional Creators
- Motamedi, M. Edward, Herzig, Hans Peter, Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, and SPIE Digital Library
Access Online
- Series
- Subject(s)
- Note
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note
- Includes bibliographical references and index.
- Other Forms
- Also available in print.
- Reproduction Note
- Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
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