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Micromachining technology for micro-optics [electronic resource] : 20 September 2000, Santa Clara, USA / Sing H. Lee, Eric G. Johnson, chairs/editors ; sponsored by SPIE-the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).

Published
Bellingham, Wash., USA : SPIE, [2000]
Copyright Date
©2000
Physical Description
v, 180 pages : illustrations ; 28 cm.
Additional Creators
Lee, S. H. (Sing H.), 1939-, Johnson, Eric Gunnar, 1936-, Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories, and SPIE Digital Library
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AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
Bibliography Note
Includes bibliographical references and index.
Other Forms
Also available in print.
Reproduction Note
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
View MARC record | catkey: 4575775