Actions for Microlithographic techniques in integrated circuit fabrication II [electronic resource] : 28-30 November 2000, Singapore

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Microlithographic techniques in integrated circuit fabrication II [electronic resource] : 28-30 November 2000, Singapore / Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) [and others].

Published
Bellingham, Wash., USA : SPIE, [2000]
Copyright Date
©2000
Physical Description
xv, 194 pages : illustrations ; 28 cm.
Additional Creators
Mack, Chris A., Yuan, Xiaocong, Society of Photo-optical Instrumentation Engineers, Nanyang Technological University, Institute of Physics, Singapore, and SPIE Digital Library
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AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
Bibliography Note
Includes bibliographical references and index.
Other Forms
Also available in print.
Reproduction Note
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
View MARC record | catkey: 4575925