Actions for MEMS reliability for critical and space applications [electronic resource] : 21-22 September, 1999, Santa Clara, California

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MEMS reliability for critical and space applications [electronic resource] : 21-22 September, 1999, Santa Clara, California / Russell A. Lawton [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SolidState Technology [and others].

Published
Bellingham, Wash. : SPIE, [1999]
Copyright Date
©1999
Physical Description
vi, 176 pages : illustrations ; 28 cm.
Additional Creators
Lawton, Russell A., Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization), and SPIE Digital Library
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AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
Bibliography Note
Includes bibliographical references and index.
Other Forms
Also available in print.
Reproduction Note
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
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